| MIC-FEM8000F Schottky Field Emission Gun Scanning Electron Microscope Pro FEG SEM | ||
| Resolution | 1.5nm@15KV(SE); 3nm@20KV(BSE) | |
| Magnification | 15x~500000x | |
| Electron Gun | Schottky Emission Electron Gun | |
| Electron Beam Current | 10pA~0.3μA | |
| Accelerating Voatage | 0~30KV | |
| Vacuum System | 2 Ion Pumps, Turbo Molecular Pump, Mechanical Pump | |
| Detector | SE: High Vacuum Secondary Electron Detector (With Detector Protection) | |
| BSE: Semiconductor Four Segmentation Back Scattering Detector | ||
| CCD | ||
| Specimen Stage | Five Axes Eucentric Motorized Stage | |
| Travel Range | X | 0~80mm |
| Y | 0~50mm | |
| Z | 0~30mm | |
| R | 360º | |
| T | -5º~70º | |
| Max Specimen Diameter | 175mm | |
| Modification | EBL; STM; AFM; Heating Stage; Cryo Stage; Tensile Stage; Micro-nano Manipulator; SEM+Coating Machine; SEM+Laser Etc. | |
| Accessories | X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine Etc. | |
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