MIC-FEM8100F Schottky Field Emission Gun Scanning Electron Microscope Pro FEG SEM | ||
Resolution | 1nm@30KV(SE); 3nm@1KV(SE); 2.5nm@30KV(BSE) | |
Magnification | 15x~800000x | |
Electron Gun | Schottky Emission Electron Gun | |
Electron Beam Current | 10pA~0.3μA | |
Accelerating Voltage | 0~30KV | |
Vacuum System | 2 Ion Pumps, Turbo Molecular Pump, Mechanical Pump | |
Detector | SE: High Vacuum Secondary Electron Detector (With Detector Protection) | |
BSE: Semiconductor Four Segmentation Back Scattering Detector | ||
CCD | ||
Specimen Stage | Five Axes Eucentric Motorized Stage | |
Travel Range | X | 0~150mm |
Y | 0~150mm | |
Z | 0~60mm | |
R | 360º | |
T | -5º~75º | |
Max Specimen Diameter | 320mm | |
Modification | EBL;STM; AFM; Heating Stage; Cryo Stage;Tensile Stage; Micro-nano Manipulator; SEM+Coating Machine; SEM+Laser Etc. | |
Accessories | X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine Etc. |
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