MIC-SEM6200 Scanning electron microscopy (sem) is suitable for the observation of the surface topography of metals, ceramics, semiconductors, minerals, biology, polymers, composites and nano-scale one-dimensional, two-dimensional and three-dimensional materials (secondary electron image, backscattered electron image).It can be used to analyze the point, line and surface components of microregion.It is widely used in petroleum, geology, mineral field, electronics, semiconductor field, medicine, biology field, chemical industry, polymer material field, criminal investigation of public security, agriculture, forestry and other fields.
| MIC-SEM6200 Tungsten Filament SEM | ||
| Resolution | 4.5nm@30KV(SE); 6nm@30KV(BSE) | |
| Magnification | Negative Magnification: 15x~250000x; Screen Magnification: 30x~500000x | |
| Electron Gun | Tungsten Heated Cathode-Pre Centered Tungsten Filament Cartridge | |
| Accelerating Voltage | 0~30KV | |
| Lens System | Three-level Electromagnetic Lens (Tapered Lens) | |
| Objective Aperture | Molybdenum Aperture Adjustable Outside Vacuum System | |
| Specimen Stage | Five Axes Stage | |
| Travel Range | X(Auto) | 0~50mm |
| Y(Auto) | 0~50mm | |
| Z(Manual) | 0~25mm | |
| R(Manual) | 360º | |
| T(Manual) | -5º~90º | |
| Max Specimen Diameter | 150mm | |
| Detector | High Vacuum Secondary Electron Detector (With Detector Protection) | |
| Modification | Stage Upgrade; EBL;STM; AFM;Heating Stage; Cryo Stage; Tensile Stage; Micro-nano Manipulator; SEM+Coating Machine; SEM+Laser | |
| Accessories | CCD,LaB6,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine | |
| Vacuum System | Turbo Molecular Pumps;Rotation Pump | |
| Electron Beam Current | 10pAt~0.1μA | |
| PC | Customized Dell Work Station | |
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