MIC-SEM6900 electron microscopy, using international advanced technology to optimize the design of the electron optical column, using a conical lens to improve the resolution of the instrument, open-type electron gun, user-friendly replacement of the filament; with a new electrical control system, and have a number of automatic operating functions (eg: a key look like), a plurality of interface is suitable for connecting a variety of accessories for your device, programmable gain bandwidth, is a high-performance scanning electron microscopy, to provide users with a broader field of application development.
| MIC-SEM6900 Tungsten Filament Scanning Electron Microscope | ||
| Resolution | 3nm@30KV(SE); 6nm@30KV(BSE) | |
| Magnification | Negative Magnification: 6x~300000x; Screen Magnification: 12x~600000x | |
| Electron Gun | Tungsten Heated Cathode-Pre Centered Tungsten Filament Cartridge | |
| Accelerating Voltage | 0~30KV | |
| Lens System | Three-level Electromagnetic Lens (Tapered Lens) | |
| Sample stage | Manual OR X / Y axis auto | |
| Objective Aperture | Molybdenum Aperture Adjustable Outside Vacuum System | |
| Specimen Stage | Five Axes Stage | |
| Travel Range | X(Auto) | 0~80mm |
| Y(Auto) | 0~60mm | |
| Z(Manual) | 0~50mm | |
| R(Manual) | 360º | |
| T(Manual) | -5º~90º | |
| Max Specimen Diameter | 175mm | |
| Detector | High Vacuum Secondary Electron Detector (With Detector Protection) | |
| Modification | Stage Upgrade; EBL; STM; AFM; Heating Stage; Cryo Stage; Tensile Stage; Micro-nano Manipulator; SEM+Coating Machine; SEM+Laser | |
| Accessories | CCD,LaB6,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine | |
| Vacuum System | Turbo Molecular Pumps;Rotation Pump | |
| Electron Beam Current | 10pA~0.1μA | |
| PC | Customized HP Work Station | |
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